Laboratory for Emerging Technologies - Research

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Micro- and Nano-Fabrication

Uniform self-assembled AAO nanopore arrays
Uniform nanopost/nanotube arrays using bottom-up fabrication techniques (nanoposts/tubes made of carbon, Au, Si, polymer)
Nano-probes and nano-sensors
Anodization, pore-widening, electrodeposition, electroless deposition, e-beam evaporation
Dry Etching: RIE, Ion Milling
Wet Etching
Lithography: e-beam, optical

Xu, J.M.

Nanotubes grown on glass
Mehrmanesh, L.

Xu, J.M.

Xu, J.M.

Oblique SEM view of periodic gold-nanodot arrays on glass substrate.
Cloutier, S.

SEM of Matrix

J. F. Waters, L. Riester, M. Jouzi, P. R. Guduru, and J. M. Xu "Buckling instabilities in multi-walled carbon nanotubes under uniaxial compression", APL, 85(10), 1787-1789, 2004.

Large variation of sputtered AuPd particle size

Process flow illustrating the two step anodization process whereby the highly ordered pretexturing left behind after the 1st anodization leads to the formation of highly ordered nanochannels after the 2nd anodization

SEM cross-sectional image showing the thickness of the mesh-like formation of ZnO nanorods

In-situ TEM imaging of real-time VLS growth of Ge nanowires starting with a Au catalyst

Chik, H (2004). Zinc Oxide Nanorods. PhD Thesis, Brown University, RI.

Home

People

Research

Publications

Facilities

Visitors & Applicants

Micro- and Nano-Fabrication

Xu, J.M.

Nanotubes grown on glass
Mehrmanesh, L.

Xu, J.M.

Xu, J.M.

Oblique SEM view of periodic gold-nanodot arrays on glass substrate.
Cloutier, S.

SEM of Matrix

J. F. Waters, L. Riester, M. Jouzi, P. R. Guduru, and J. M. Xu "Buckling instabilities in multi-walled carbon nanotubes under uniaxial compression", APL, 85(10), 1787-1789, 2004.

Large variation of sputtered AuPd particle size

Process flow illustrating the two step anodization process whereby the highly ordered pretexturing left behind after the 1st anodization leads to the formation of highly ordered nanochannels after the 2nd anodization

SEM cross-sectional image showing the thickness of the mesh-like formation of ZnO nanorods

In-situ TEM imaging of real-time VLS growth of Ge nanowires starting with a Au catalyst

Chik, H (2004). Zinc Oxide Nanorods. PhD Thesis, Brown University, RI.

Fabrication Process

J. Liang, H. Luo, R. Beresford, and J.M. Xu, "A growth pathway for highly ordered quantum dot arrays", Appl. Phys. Lett., 85, 5974-5976, 2004.

Home

People

Research

Publications

Facilities

Visitors & Applicants

Micro- and Nano-Fabrication

Xu, J.M.

Nanotubes grown on glass Mehrmanesh, L.

Xu, J.M.

Xu, J.M.

Oblique SEM view of periodic gold-nanodot arrays on glass substrate. Cloutier, S.

SEM of Matrix

J. F. Waters, L. Riester, M. Jouzi, P. R. Guduru, and J. M. Xu "Buckling instabilities in multi-walled carbon nanotubes under uniaxial compression", APL, 85(10), 1787-1789, 2004.

Large variation of sputtered AuPd particle size

Process flow illustrating the two step anodization process whereby the highly ordered pretexturing left behind after the 1st anodization leads to the formation of highly ordered nanochannels after the 2nd anodization

SEM cross-sectional image showing the thickness of the mesh-like formation of ZnO nanorods

In-situ TEM imaging of real-time VLS growth of Ge nanowires starting with a Au catalyst

Chik, H (2004). Zinc Oxide Nanorods. PhD Thesis, Brown University, RI.

Fabrication Process

J. Liang, H. Luo, R. Beresford, and J.M. Xu, "A growth pathway for highly ordered quantum dot arrays", Appl. Phys. Lett., 85, 5974-5976, 2004.

Nanotubes grown on glass
Mehrmanesh, L.

Oblique SEM view of periodic gold-nanodot arrays on glass substrate.
Cloutier, S.